The 82nd JSAP Autumn Meeting 2021
Session ID : 13p-S301-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Fabrication and structural analysis of a-CNx:H thin films with high nitrogen content by microwave plasma CVD of the acetylene-nitrogen gas mixture
Details
Article 1st page
