The 82nd JSAP Autumn Meeting 2021
Session ID : 13p-S301-13
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Martens Hardness of DLC Deposited by GCIB Assisted Vapor Deposition under Different Film Formation Conditions
*Yu Owada, Akio Nishiyama, Ryota Yoshikawa, Junji Taguchi, Keishi Komatsu, Hidetoshi Saitoh
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