The 82nd JSAP Autumn Meeting 2021
Session ID : 10a-N402-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Ultrathinning of window material (Si3N4) using gas cluster ion beam for high-sensitivity XPS measurement of solutions
Details
Article 1st page
