The 82nd JSAP Autumn Meeting 2021
Session ID : 22p-P01-12
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Low-temperature Formation of High-Mobility IGZO Thin Film Transistors using Reactive Plasma Processes (IV)
*Kosuke Takenaka, Yuji Hayashi, Hibiki Komatsu, Susumu Toko, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara
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