The 82nd JSAP Autumn Meeting 2021
Session ID : 13a-N323-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Effects of Gas Pressure on Size of Carbon Nanoparticles Synthesized by Ar+CH4 Capacitively Coupled Plasma CVD
*Kazunori Koga, Sung Hwa Hwang, Shinjiro Ono, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Susumu Takabayashi, Jun Seok Oh, Tatsuyuki Nakatani, Masaharu Shiratani
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