The 82nd JSAP Autumn Meeting 2021
Session ID : 10p-N101-12
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Fabrication of GaN Topological Photonic Crystal Membranes in Visible Wavelength Region by Combination Process of HEATE and Wet Etching
Keywords:
10p-N101-12,
Nitride semiconductor
Details
Article 1st page
