The 82nd JSAP Autumn Meeting 2021
Session ID : 10p-N102-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Substrates Off-Cut Dependence on the Crystallinity of the a-plane AlN Prepared by Sputtering and Annealing Method
*Kota Shibutani, Kenjiro Uesugi, Shiyu Xiao, Kanako Shojiki, Shigeyuki Kuboya, Toru Akiyama, Hideto Miyake
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