The 82nd JSAP Autumn Meeting 2021
Session ID : 10p-N102-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Effects of high N2 sputtering gas ratio on the growth of non-polar AlN on Si
*Masaya Morita, Keiji Ishibashi, Kenichiro Takahashi, Shigenori Ueda, Toyohiro chikyow, Atsushi Ogura, Takahiro Nagata
Author information
Details
Article 1st page
