The 69th JSAP Spring Meeting 2022
Session ID : 25p-E104-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Electrical characterization of adhesion property degradation in BN/Si devices
*Takayuki Matsuda, Takashi Hamano, Yuya Asamoto, Masao Noma, Michiru Yamashita, Shigehiko Hasegawa, Keiichiro Urabe, Koji Eriguchi
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