The 69th JSAP Spring Meeting 2022
Session ID : 25p-E104-12
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Effect of Noble Gas on a-C:H Film Deposition by Tailored Voltage Waveform-PECVD
*Daiki Nagamatsu, Toshiaki Arima, Michihiro Otaka, Daisuke Yamashita, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Hiroshi Otomo, Takahiro Shindo, Satoshi Tanaka, Tatsuo Matsudo
Author information
Keywords:
25p-E104-12,
Plasma CVD
Details
Article 1st page
