The 69th JSAP Spring Meeting 2022
Session ID : 25p-E104-13
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Relationship between deposition precursors and film properties of hydrogenated amorphous carbon deposited by C3H6 / H2 plasma
Jumpei Kurokawa, Tadashi Mitsunari, *Hiroki Kondo, Takayoshi Tsutsumi, Makoto Sekine, Kenji Ishikawa, Masaru Hori
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