The 69th JSAP Spring Meeting 2022
Session ID : 25p-E104-15
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Characterization of a-C:F films formed at low temperature on a copper substrate by low-energy electron irradiation on c-C4F8 condensed layer.
Details
Article 1st page
