The 69th JSAP Spring Meeting 2022
Session ID : 25p-E104-14
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Infrared Spectroscopy of Substrate Bias Effects on Film Deposition during Acetylene Plasm
*Tatsuo Nakai, Atsuya Kuwada, Ryou Sasamoto, Masanori Shinohara, Takashi Matsumoto, Satoshi Tanaka
Author information
Keywords:
25p-E104-14,
amorphous carbon film,
acetylene plasma,
multiple-internal-reflection Infrared absorption spectroscopy
Details
Article 1st page
