The 69th JSAP Spring Meeting 2022
Session ID : 24a-E302-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Characterization of mist-Al2O3 gate insulator and its application in mist-Al2O3/AlGaN/GaN MOS-HEMTs
*Tomohiro Motoyama, Shun Urano, Ali Baratov, Yusui Nakamura, Masaaki Kuzuhara, Joel Asubar, Zenji Yatabe
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