The 69th JSAP Spring Meeting 2022
Session ID : 24p-E302-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Carrier transport properties in inversion layer of Si-face 4H–SiC MOSFET with nitrided oxide
*Munetaka Noguchi, Toshiaki Iwamatsu, Hiroyuki Amishiro, Hiroshi Watanabe, Naruhisa Miura, Koji Kita, Satoshi Yamakawa
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