The 69th JSAP Spring Meeting 2022
Session ID : 24p-E302-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Characterization of deep trap profiles in near-interface oxide of SiC MOS interfaces using various irradiated light wavelengths and measurement temperatures
Keywords:
24p-E302-10,
MOS interface traps,
Photo-assisted C-V measurement,
Low Temperature C-V measurement
Details
Article 1st page
