The 69th JSAP Spring Meeting 2022
Session ID : 22p-E202-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Effect of gas species on ICP etching during fabrication of AlGaN/GaN-based HFET-type photosensors
Details
Article 1st page
