The 69th JSAP Spring Meeting 2022
Session ID : 24p-D316-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Fabrication and Characterization for Nano-structures of Al2O3 Formed by Soaking in Hot Water after Deposition by ALD
Details
Article 1st page
