The 69th JSAP Spring Meeting 2022
Session ID : 25a-E202-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Fabrication of ZnO nanoparticle dispersed (Ga,Al)2O3 thin films by mist CVD
*Tsukasa Yagasaki, Toshihiro Nara, Keisuke Tanaka, Riki Ito, Tetsuya Kouno, Yuuko Kominami, Kazuhiko Hara
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