The 69th JSAP Spring Meeting 2022
Session ID : 25a-E202-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Epitaxial growth of WO3 films and their gas sensing properties
Keywords:
25a-E202-6,
metal oxide semiconductor gas sensor,
pulsed laser deposition,
gas selectivity
Details
Article 1st page
