Paper
筋肉アクチュエータ用Fe-Sm/Si/Fe-Tb三層複合体の膜厚比による磁場誘起運動制御
2009 年 21 巻 3+4 号 p. 53-56
詳細
2009 年 21 巻 3+4 号 p. 53-56
Effects of thickness ratio of Fe-Sm to (Fe-Sm)+(Fe-Tb) films of three layered Fe-Sm / Si / Fe-Tb composite on magnetostriction, bending strain and its force induced by weak magnetic field within 600 kAm-1 were investigated with the object that such composite being produced by direct current magnetron sputtering process will be used for mover device. Magnetostriction, bending strain and its force of the mover composites were in full control of film thickness ratio of [Fe-Sm] / [(Fe-Sm)+(Fe-Tb)]. The high susceptibility with low bending strain was obtained for the device with the high film thickness ratio, whereas the high bending strain with low susceptibility was gotten for the device with the low thickness ratio.
