エネルギーフィルターを備えたオメガトロン型質量分析器による水素シートプラズマ中での負イオン温度計測

抄録

We succeeded in measuring the negative hydrogen ions temperature T_H^- in the sheet plasma by using an omegatron mass spectrometer. The T_H^- was determined by measuring the ion current as a function of the ion repeller voltage V_G2 using the omegatron mass spectrometer. Calculated using an energy distribution function, T_H^- was approximately 0.27 eV in the sheet plasma.