Journal of Advanced Science
Online ISSN : 1881-3917
Print ISSN : 0915-5651
ISSN-L : 0915-5651
Paper
めっき法で作製したP型アンチモン・テルル薄膜の熱処理と拡散防止膜の導入による高性能化
Tomomi HARADAYusuke SASAKIMitsuaki OKUHATAMasayuki TAKASHIRI
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2017 年 29 巻 論文ID: 29104

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We investigated the thermoelectric properties of electrodeposited Sb-Te thin films using thermal annealing and incorporating diffusion barrier layer between the stainless steel substrate and the Sb-Te thin film. Molybdenum (Mo) and nickel (Ni) films were used as a diffusion barrier layer. Surface morphology was observed by scanning electron microscope, and crystallographic characteristic was examined by X-ray diffraction analysis. In-plane thermoelectric properties, in terms of the electrical conductivity, Seebeck coefficient and power factor, were measured at room temperature. It was found that Sb-Te thin film with Mo layer exhibited higher thermoelectric performance compared to that of Sb-Te thin film with no diffusion barrier layer. This is because the impurity atoms from the substrate and Mo layer itself did not diffuse so much into Sb-Te layer. On the other hand, Sb-Te thin film with Ni layer exhibited the lower thermoelectric properties owing to the diffusion of Ni atoms into the Sb-Te thin film. Therefore, incorporation of Mo layer is beneficial to improve the thermoelectric properties of Sb-Te thin films by thermal annealing.
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