Properties of piezoelectric ceramic sheets fabricated by doctor blade

抄録

The present study aims to improve the capacity of actuator materials by focussing on the properties of a single sheet. Thin Pb(Zr_0.53Ti_0.47)O₃ and Pb(Nb_2/3Ni_1/3)_0.55(Zr_0.3Ti_0.7)_0.45O₃ composition sheets (about 130μm in thickness) with large surface areas were fabricated and their properties were investigated. Green sheets with uniform thickness distribution were fabricated by the doctor blade with a slurry viscosity of 2000-5000cp. Additives such as solvent, binder, plasticizer and dispersant were completely eliminated by the heat treatment which was carried out at 500°C. The PbO excess atmosphere sintering at temperatures above 1050°C and 1200°C produced high density Pb(Zr_0.53Ti_0.47)O₃ sheets with only perovskite phases, and Pb(Nb_2/3Ni_1/3)_0.55 (Zr_0.3Ti_0.7)_0.45O₃ sheets with perovskite phases and traces of pyrochlore phase, respectively. The dielectric and piezoelectric properties of sintered sheets showed slightly lower values than those of bulk samples fabricated by typical powder processing; however, the sheets exhibited a relatively large displacement at low electric fields.