A numerical method to simulate the flow induced by the Marangoni convection and the surface tension with the free surface has been developed using the GSMAC-FEM. Level Set Method was applied to capture the free surface and CIP-FEM was used for the advection equation governing a kinematic condition of the free surface, re-initialization for the distance function and the total volume conservation. Oscillation of a liquid droplet was calculated and highly accurate volume conservation was performed. Numerical analysis of the thermocapillary flows in a square cavity was performed whether the surface tension term is treated as the body force or the surface force. Both results were good agreement with each other. Numerical simulation for Marangoni convection in a liquid bridge between two discs was successfully simulated.