1997 年 31 巻 66 号 p. 18-24
In this paper, we present 3D micro-EDM with electrodes having simple square cross section. In order to maintain the original electrode shape, the machining conditions are set so that the bottom of the electrode is properly worn. The influence on the precision of the machined surface is analyzed by changing machining conditions such as tool path and number of cutting steps. Furthermore, the formula for tool wear compensation in 3D micro-EDM has been derived. As a result, square cavities with sharp corners could by machined. Inclined planes could also be machined by applying the compensation equation.