C-1 LASER FORMING OF GLASS AND SILICON FOILS(Session: Forming I)

抄録

In this study, borosilicate glass and single crystal silicon foils were bent by laser forming process. Single crystal silicon foils were formed at room temperature. Borosilicate glass foils were formed with elevating temperature to 280℃ by a resistance heater. Both materials were formed in air. Laser power, laser scanning velocity and defocus length were changed, and variation of bending angle was investigated. In the case of borosilicate glass foils, bending angle became maximum when the laser power was 12W and defocus length was 8mm. Bending angle was larger when scanning velocity was smaller. In the case of single crystal silicon foils, bending angle was maximum when laser power was 13W, scanning velocity was 15mm/s and defocus length was 5mm.