D-6 FABRICATION OF A METALLIC MICRO-PUMP FOR BIOMEDICAL APPLICATION USING METAL FORMING(Session: Forming/Vegetable-oil/Rubber)

抄録

In this study, we developed a micro pump with dimension of several millimeters using micro metal forming in a progressive die. All of the parts were made of sheet metal and fabricated and assembled in the progressive die by the press forming. The results show that the micro pump by using metal forming has potential to be fabricated in much smaller size and lower cost in comparison with semiconductor process or other processes.