抄録
The integration of passive sensors like gratings into the surface of micro systems is a convenient way to measure system parameters under long term conditions. In this paper a new approach is proposed. The first diffraction order of a specimen grating under load is investigated by means of Digital Holography. The sensitivity of this technique is discussed theoretically and an experimental setup is presented implementing this method. Finally, experimental investigations are shown which prove the Digital Holography to be able to measure displacements of a surface grating under load. To demonstrate the feasibility of this technique for use in reliability testing of polymeric micro components, the surface gratings were directly implemented into a PMMA substrate using an excimer laser.
