抄録
MEMS(Micro ElectroMechanical Systems) and NEMS(Nano ElectroMechanical Systems) have been developed based on a silicon bulk-micromachining. Electrostatically levitated ring rotor gyroscope, thermal RF relay for LSI tester, on-chip AlN thin film resonator, components for multi-column electron beam lithography system and multiprobe data storage system and carbon nano-tube structures are described.
