Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics
Online ISSN : 2424-2837
セッションID: OS06W0426
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OS06W0426 MEMS device characterization for repeated cyclic operation
Hiroyuki Fujita
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This paper deals with characterization of micro electro mechanical systems (MEMS) under cyclic loading; such characterization is essential to confirm the reliability of MEMS in practical applications. Examples include torsion beams supporting a micro mirror of an optical matrix switch, a cantilever with a vertical micro mirror of an optical bypass switch, and thermo-elastically deformed 3-D structures. Those devices are made of poly or single-crystal silicon. Typical life time of these devices exceeded a few tens of million cycles.
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© 2003 一般社団法人 日本機械学会
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