OS6(2)-8(OS06W0416) Reliability Assessment for MEMS Actuator through Analysis of Resonant Frequency Variation with Defect Growth

Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics

Online ISSN : 2424-2837

2003

DOI https://doi.org/10.1299/jsmeatem.2003.110

会議情報

OS6(2)-8(OS06W0416) Reliability Assessment for MEMS Actuator through Analysis of Resonant Frequency Variation with Defect Growth

Jong Jin Kim, Dongil Son, Dongil Kwon

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会議録・要旨集フリー

p. 110-

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© 2003 The Japan Society of Mechanical Engineers

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Proceedings of the Asian Pacific Conference on Fracture and Strength and International Conference on Advanced Technology in Experimental Mechanics

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