抄録
In order to measure three-dimensional displacement components of small objects such as a MEMS, the windowed phase-shifting digital holographic interferometry (Windowed PSDHI) previously developed by the authors is applied to a microscope. Three object laser beams in the optical system are used. Four phase-shifted holograms are recorded for each object laser beam. The complex amplitude of each reconstructed beam at the object is calculated by the Fresnel diffraction integral of the complex amplitude of the hologram. The reconstructed distance is obtained at the point with the maximum of the standard deviation of the intensity of the object reconstructed with changing the reconstruction distance. The three phase-difference values between before and after deformation provide the three-dimensional displacement components. The theory and applications are shown.
