抄録
Surface microstates of real surfaces of solid materials change in industrial environments, or they are changed in industrial surface processes positively. A real time diagnosis technique for the surface microstates should be developed for the process control. We propose a diagnosis technique for temperature and microstructure of real surfaces on a basis of the hardware performance of our wide-spectral-range high-speed spectrophotometer system. With respect to the temperature, an active spectral pyrometer technique is adopted, in which the reflection of the surface is measured as well as the self-emission. With respect to the microstructure, an attention is paid to the interference and diffraction of radiation in a new real surface model. An experiment is made on a metal surface in a high-temperature oxidation process to verify the performance of this technique. Spectra of emission and reflection energy of radiation in a near-infrared through infrared region are measured at every 2s, and analyzed. Time transition of the surface temperature of an order of 1100K is estimated within an inaccuracy of 10K. The average thickness d and rms roughness σI of the surface film are estimated to be in regions of d=0.08∼3.8µm and σI=0.01∼0.71µm, respectively.
