Precision Fabrication of a Large-Area Sinusoidal Surface Using a Fast-Tool-Servo Technique ─Improvement of Local Fabrication Accuracy─

抄録

This paper describes a diamond turning fabrication system for a sinusoidal grid surface. The wavelength and amplitude of the sinusoidal wave in each direction are 100µm and 100nm, respectively. The fabrication system, which is based on a fast-tool-servo (FTS), has the ability to generate the angle grid surface over an area of φ 150mm. This paper focuses on the improvement of the local fabrication accuracy. The areas considered are each approximately 1 × 1mm, and can be imaged by an interference microscope. Specific fabrication errors of the manufacturing process, caused by the round nose geometry of the diamond cutting tool and the data digitization, are successfully identified by Discrete Fourier Transform of the microscope images. Compensation processes are carried out to reduce the errors. As a result, the fabrication errors in local areas of the angle grid surface are reduced by 1/10.