The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2002.15
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Effect of Internal Stress on Stress Field near Interface Edge between Thin Films
Hiroyuki HIRAKATA, Yoshitake YAMAMOTO, Takayuki KITAMURA
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Keywords: Thin Film, Interface Toughness, Internal Stress, Interface Edge, Stress Singularity, Fracture Mechanics, Delamination, Copper
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 317-318

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© 2002 The Japan Society of Mechanical Engineers
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