抄録
This paper proposes an effective scheme for quick and precise tracking control of a piezoelectric actuator. The proposed approach is based on the combination of a feedforward loop and a PID(proportional integral derivative) feedback controller. The feedforward loop is formed by an inverse model of the actuator that includes hysteresis compensation, mechanical oscillations and losses compensation and resistive losses compensation. In order to avoid using a bulky and costly displacement sensor in the feedback loop, a detection model has been developed to compute the displacement of the piezoelectric actuator as a function of the supplying current.