Recently, high-resolution measurement instruments such as probe microscopes have widely been used, since their price is getting down, their size is becoming compact. Therefore, these measurement instruments have been used at various environments. However, to use these instruments effectively, it is important to isolate the environmental vibration transmitted to these instruments. For this reason, we are developing new built-in type multi-axis vibration isolation device with inertia force generators (IFG). Designing this vibration isolation device, modal analysis and "direct inertia force control (DIFC)" was used. DIFC is the newly developed design method for the vibration control systems proposed by authors. Modal analysis and DIFC could make the complex control system design process more simple and clear. In this paper, we will show how the controller is designed, and also discuss the effectiveness of the method in experiment.
