448 磁石可動形リニアモータによる搬送台の外乱絶縁制御

抄録

When precision industrial products such as electronic component are transported in a vehicle, damage may be caused with disturbance. Disturbance is impact/vibration inertia force or forced displacement Under the present conditions, damage is being reduced using cushioning material, but anti-shock/vibration device is necessary according to the increasing demand of precision product performance. In this paper, we propose the disturbance isolation control of a transportation platform using a moving-magnet-type linear motor. Experiments are performed for constant forced displacement as disturbance and show that the platform is maintained at the desired position using the current control or voltage control.