抄録
Ultra precision apparatus like semiconductor producing equipment needs high accuracy at manufacturing. Therefore active isolation systems to avoid vibration transmission from vibration sources to the precision apparatus are very important. Vibration characteristics of an isolation table varies as any elastic loads are put on it. Then the isolation performance is degraded due to the change of the characteristics. Therefore, the controllers for the active isolation table should be designed taking account of elastic loads. For this purpose, a dynamical model must be identified that takes the dynamics of elastic loads into consideration to such controllers. In this research, an experimental active isolation table with an elastic load is built. Its dynamical model is identified and a feedback controller is designed by using the model. Property of the obtained controller is qualified through computer simulations.
