抄録
A Micro Flow Sensor is a thermal flow sensor designed for flow meters. The sensor consists of a platinum resistive heating element and two platinum resistive sensing elements on a thermally isolated thin silicon nitride diaphragm. The diaphragm is realized on silicon substrate using silicon micro machining. The sensor can be also utilized for wall shear stress measurement. In addition to this, linear arrayed shear stress sensor for a feedback control of wall turbulence is now under evaluation. Several examples of applications are shown in this paper.
