茨城講演会講演論文集
Online ISSN : 2424-2683
ISSN-L : 2424-2683
セッションID: 701
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サファイアウエハの研削メカニズムに関する研究
- 盛り上がり係数が除去モードに及ぼす影響 -
*長谷川 滉輔菅野 直周 立波清水 淳小貫 哲平尾嶌 裕隆
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Mono-crystal sapphire is widely used for smartphone cover glasses, blue LED substrates and other optical and electronic applications. Sapphire crystal is extremely high in both in strength and toughness. Also, mono-crystal sapphire takes a hexagonal structure with C- (0001), A- (112̅0), M- (101̅0) and R-(11̅02) planes, but lack of clear cleavage or slip/twin plane. Such kind of material commonly falls in a category of difficult to cut material. Its material removal mechanism in grinding is insufficiently elucidated. Rotary infeed surface grinding by diamond wheel is an alternative used for wafering of sapphire crystal. In this study, the removal mechanism of rotary infeed surface grinding is investigated, via grinding power and cross-section of individual chip, under different grinding conditions and wheel specifications. It was found that specific grinding energy Cp increases with a decreasing in chip cross-section and the coefficient C is important parameter for determining material removal mode.
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