抄録
The purpose of this research is to increase the processing efficiency by performing ELID grinding using fixed abrasive grains for brittle material of high hardness such as sapphire. Grinding of sapphire involves problems of falling off and burying of abrasive grains. As a solution, use a high hardness iron bonded diamond wheel made by electroplating method. Moreover, in order to obtain good surface roughness for sapphire, it is considered effective to increase the processing pressure applied to the abrasive grains. Therefore, we developed a grinding stone with the concentration degree set to 50. This grinding wheel and sapphire were attached to a triaxial processing machine, and ELID grinding processing was performed on the A side of sapphire by a traverse method. As a result of experiments, it was confirmed that the developed grinding wheel has removal ability against sapphire. In addition, good surface roughness could be confirmed at more places than the processing result of concentration degree 100.
