Basic study on mirror surface grinding of CVD-SiC material

Abstract

This study is mainly focused on the selection of grinding conditions for mirror finish of CVD-SiC work piece. Because surface roughness affects products quality when CVD-SiC is used as a molding die. In addition, since this material has a wide range of other uses, many precise processing techniques are required. As a result, it was possible to get a required surface by choosing a grinding wheel with a fine grain size, shortening the feed pitch, and performing truing before grinding. In this study, it was possible to select the reasonable grinding condition with the help of grinding principle and method shown in the paper.