抄録
Diamond-like carbon（DLC）films are characterized by the amorphous structure and exhibit interesting mechanical and tribological properties. The role of thickness of HMDSO（Hexamethyldisiloxane）intermediate layer influence upon adhesion is not yet fully reported. In this study, the relationship between thickness of intermediate layer and adhesion of DLC was observed. First, HMDSO layers were deposited on chromium plating substrates, followed by DLC layers were deposited. The HMDSO layers and DLC films were deposited by plasma-enhanced chemical vapor deposition （PECVD）. To evaluate thickness of intermediate layer influence on adhesion properties of DLC films, the samples were deposited different thicknesses of intermediate layer. In the tensile test, the sample of thinnest HMDSO intermediate layer showed maximum adhesion. But, the sample without intermediate layer showed greatest adhesion in the ball-on-disk test. This difference can be explained by the difference in lording direction. From this experiment, the correlation between the thickness of HMDSO intermediate layer and the adhesion of DLC films was reported.
