抄録
A novel optical head slider for near-field recording is proposed. A air bearing pad pattern formed on the apex of cantilever-like polymeric waveguide, and using the cantilever itself as a suspension of slider, function of flying slider, suspension, and waveguide are all included into one body structure. This structure (flexible head slider) can be fabricated by the method similar to lithographical technique. This structure will be expected to have great advantages in miniaturization of head assembly, simplification of assembling and optical trimming process, and more, lightweight of head assembly brings wider tracking bandwidth. In this paper, We report the experimental evaluation result of prototypes, especially on it's dynamic characteristic of spacing control. As a disturbance, the supporting point of the slider assembly was shook toward out-of-plane direction, and the frequency response to the head to medium spacing was measured. As the result, the ratio of the vibration amplitude to the spacing variation at the major resonance frequency was less than -30dB.