抄録
For examining molecular gas film lubrication (MGL) characteristics in several nanometers, free molecular MGL equation, which employs Poiseuille flow rate for free molecular flow region, is utilized to calculate the characteristics of plane inclined slider and step slider. As the minimum spacing decreases, results of conventional MGL equation and the free molecular MGL equation become close each other, which means free molecular MGL equation is applicable for several nanometer region. Moreover, differences among any flow rates in Poiseuille flows become diminished, as the minimum spacings decreases and bearing number increases.
