抄録
Development of the information and communication technology is remarkable. The portable or wearable information terminals will upgrade more, and remote sensor devices will work in information network for various services. The micro, portable energy sources with more energy and power density than batteries are necessary there. Then, new micro power sources, such as portable fuel cell, vibration-driven power generators, shoe power generators, wireless power supply methods are developed by using micro-machine/MEMS technology.
