抄録
This paper proposes a novel micro actuator mechanism that moves to not only lateral but also vertical directions independently for ultra-high density data storage devices. This mechanism consists of high aspect-ratio parallel ribs and flat plate structure. These mechanisms are PZT thin film-driven unimorph lateral and vertical actuator mechanisms, respectively. The design procedure is studied and the optimum design is established. Micro-machining process for the novel micro-actuator mechanism is also investigated. The sidewalls of the ribs should have very small surface roughness since PZT thin film should be deposited on those surfaces. Therefore, our improved Si deep etching process based on ICP-RIE is developed and this suggests the feasibility of fabricating the proposed micro-actuator mechanism.
