Abstract
This paper proposes a novel micro actuator head for ultra-high density hard disk devices. In order to improve of the recording density of the hard disk drive, tracking control technology that positions heads on the track with high speed and high reliability and head-disk spacing control technology are necessary. In this study, the microstructure that was able to be driven independently in both tracking directions of in-plate and out of-plate motion by the use of the PZT thin film was developed. This mechanism consists of high aspect-ratio parallel ribs and flat plate structure. This paper also reports a silicon micro machining technology and the PZT thin film deposition technology on the vertical sidewall of parallel ribs necessary.
